Grain Orientation Mapping of Passivated Aluminum Interconnect Lines with X-ray Micro-Diffraction
نویسندگان
چکیده
منابع مشابه
High Spatial Resolution Grain Orientation and Strain Mapping in Thin Films using Polychromatic Submicron X-ray Diffraction
The availability of high brilliance synchrotron sources, coupled with recent progress in achromatic focusing optics and large area 2D detector technology, have allowed us to develop a X-ray synchrotron technique capable of mapping orientation and strain/stress in polycrystalline thin films with submicron spatial resolution. To demonstrate the capabilities of this instrument, we have employed it...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 1998
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-524-55